Thin film manufacturing method and method of manufacturing substrate

A thin film manufacturing method of manufacturing a laminate of a thin film of a coating film member and a support member, comprising:

• a coating step of coating the coating film member on a surface of a peeled-off member;
• a sandwiching step of sandwiching the coating film member between the support member and the peeled-off member;
• a film thinning step of reducing a thickness of the coating film member by applying an external force to the coating film member sandwiched between the support member and the peeled-off member in a state where the coating film member is softened;
• and
• a peeling step of peeling the peeled-off member off the coating film member after the film thinning step.

A thin film manufacturing method of manufacturing a laminate of a thin film and a support member, the thin film including a first coating film member and a second coating film member, comprising:

• a coating step of coating the first coating film member on a surface of the support member and coating the second coating film member on a surface of a peeled-off member;
• an attaching step of attaching the first coating film member to the second coating film member;
• a film thinning step of reducing a thickness of the first coating film member and a thickness of the second coating film member by applying an external force to the first coating film member and the second coating film member attached to each other in a state where the first coating film member and the second coating film member are softened;
• and
• a peeling step of peeling the peeled-off member off the second coating film member after the film thinning step.