Imprinting device and imprinting method

An imprinting method comprising:

• arranging a master substrate on which a fine pattern is formed, at least partially covered by a metal coating layer, on a support surface provided by a first body part;
• arranging a polymer film between the master substrate and a second body part providing a pressing surface facing the support surface, wherein the first body part comprises:
• a plurality of coil cores each having a first through hole formed in a first direction and a second through hole formed in a second direction orthogonal to the first direction, a plurality of coil lines respectively surrounding the plurality of coil cores, a plurality of first support bars each passing through the first through holes of a first set of the plurality of coil cores, and a plurality of second support bars each passing through the second through holes of a second set of the plurality of coil cores;
• heating the metal coating layer of the master substrate by providing AC power to the plurality of coil lines;
• applying pressure to the master substrate and the polymer film by the first body part and the second body part;
• and
• increasing the distance between the first body part and the second body part.