Cleaning system for semiconductor storage shelf
AssigneeChangxin Memory Technologies, Inc.
InventorYimo WANG
Life of this patent
Estimating the term…
Abstract
A cleanup system for the semiconductor storage shelf is provided. A semiconductor storage shelf is provided with a plurality of stalls. The cleanup system for the semiconductor storage shelf includes a conveying device and a cleanup device. The cleanup device is configured to clean up each stall of the semiconductor storage shelf. The cleanup device is detachably connected to the conveying device. The conveying device is configured to convey the cleanup device to each stall of the semiconductor storage shelf.
Claims18
A cleaning system for a semiconductor storage shelf, the semiconductor storage shelf being provided with a plurality of stalls, the cleanup system for the semiconductor storage shelf comprising:
- a conveying device;
- and
- a cleanup device, configured to clean up each stall of the semiconductor storage shelf, wherein the cleanup device is detachably connected to the conveying device, and the conveying device is configured to convey the cleanup device to each stall of the semiconductor storage shelf.
Dependencies are inferred from the claim text.