Fluid device
AssigneeFesto AG & Co.
InventorsMartin Maichl, Hannes Wirtl
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AssigneeFesto AG & Co.
InventorsMartin Maichl, Hannes Wirtl
Estimating the term…
A fluid device with a fluid chamber, the fluid device including a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element. The membrane element is fixed with a peripheral edge region to the device housing, wherein a membrane working section of the membrane element which is framed by the peripheral edge region can be deflected by a piezoactuator whilst carrying out a stroke movement, in order to change the volume of the fluid chamber. The membrane element is a functional constituent of the piezoactuator by way of it directly forming an electrically conductive electrode of the electrode arrangement of the piezoactuator.
A fluid device comprising a fluid chamber which is designed for receiving a fluid and which is commonly delimited by a device housing and a bending-elastic membrane element which has a planar extension in a main extension plane, wherein the membrane element at its peripheral edge region is fixed to the device housing and wherein a membrane working section of the membrane element which is framed by the peripheral edge region, for the change of the volume of the fluid chamber is elastically deflectable in a working direction which is orientated transversely to the main extension plane by a piezoactuator of the fluid device whilst carrying out a stroke movement, wherein the piezoactuator comprises an electrode arrangement, to which an operating voltage which creates the stroke movement of the membrane working section can be applied in a variable magnitude, and wherein the membrane element is a functional constituent of the piezoactuator by way of said membrane element directly forming an electrically conductive electrode of the electrode arrangement.
Dependencies are inferred from the claim text.