Biochip structure and method for making same
AssigneeSocle Technology Corp.
InventorsHSIANG-HUA LU, CHING-YU NI, YING-CHIEH PAN
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Abstract
A method for making a biochip structure, includes: providing a substrate and forming a plurality of biochips on a surface of the substrate; forming a carrier on a side of the substrate having the biochips, defining a plurality of through holes in the substrate from a side of the substrate away from the carrier; and filling conductive material in each of the through holes to connect one of the biochips. The carrier defines a plurality of openings. Each opening cooperates with substrate to form a micro-channel, and one of the biochips is exposed in the micro-channel.
Claims14
A method for making a biochip structure, comprising:
- providing a substrate having a plurality of biochips on a surface of the substrate;
- forming a carrier on a side of the substrate having the plurality of biochips, the carrier defining a plurality of openings, each of the plurality of openings cooperating with substrate to form a micro-channel, one of the plurality of biochips being exposed from the micro-channel;
- defining a plurality of through holes in the substrate from a side of the substrate away from the carrier;
- and
- filling conductive material in each of the plurality of through holes to connect one of the plurality of biochips.
A biochip structure, comprising:
- a substrate having a biochip, the substrate defining a through hole, the through hole being filled in with conductive material to connect the biochip;
- and
- a carrier on a side of the substrate having the biochip, the carrier defining an opening extending through the carrier, the opening cooperating with the substrate to form a micro-channel, the biochip being exposed from the micro-channel.
Dependencies are inferred from the claim text.