Microfluidic control chip, microfluidic apparatus, and manufacturing method thereof

A method for manufacturing a microfluidic control chip, the method comprising:

• providing a lower cover;
• forming a chip functional layer on the lower cover, the chip functional layer comprising a first region, and
• forming a upper cover on the chip functional layer,
• wherein the chip functional layer in the first region comprises at least one chamber unit, an inlet flow channel, and an outlet flow channel, and the chamber unit comprises a main flow channel, a plurality of secondary flow channels, and a plurality of microcavity structures,
• wherein the plurality of secondary flow channels are on both sides of the main flow channel and respectively connected to the main flow channel, and each of the plurality of microcavity structures is connected with one end of one of the secondary flow channels opposite from the main flow channel, and
• wherein the chamber unit is configured to allow a liquid to flow from the main flow channel to the plurality of secondary flow channels, and then to the plurality of microcavity structures.