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US 2022/0032227 A1Published application
Noble gas recovery system
OwnerAndrew James Seeley, Steve Cottle +5inventors
InventorsAndrew James Seeley, Steve Cottle, Neil Condon, Christopher Mark Bailey, Julian Richard Dean, Joanne Rachel Greenwood, Zachary Dunbar
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Abstract
A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
Claims20
A system comprising:
- a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas;
- and
- a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.
Dependencies are inferred from the claim text.