Sample holder
AssigneeKYOCERA Corporation
InventorHiromasa TAKEMORI
Life of this patent
Estimating the term…
Abstract
Provided is a sample holder capable of reducing thermal stress developed between an insulating sleeve and a metallic support. A sample holder includes: an insulating base including a sample holding face; and a support joined to the insulating base, a through hole provided in the insulating base and a hole part provided in the support communicate with each other to constitute a gas inflow hole. A tubular sleeve is situated in the hole part, and an annular member located between an outer peripheral surface of the sleeve and an inner peripheral surface of the hole part is provided. The annular member surrounds the sleeve and secures the sleeve to the support.
Claims8
A sample holder, comprising:
- a base, in plate form, comprising a first principal face serving as a sample holding face and a second principal surface, the base comprising a flow channel extending from the first principal face to the second principal face;
- a support comprising a support principal face joined to the second principal face of the base, the support provided with a hole part which is open to the support principal face;
- a tubular member situated in the hole part, the tubular member provided with a hole communicating with the flow channel;
- and
- an annular member located between an outer peripheral surface of the tubular member and an inner peripheral surface of the hole part, the annular member surrounding the tubular member and securing the tubular member to the support.
Dependencies are inferred from the claim text.