Processing apparatus and plasma processing method

A plasma processing apparatus comprising:

• a processing container;
• a stage provided in the processing container;
• a dielectric plate provided above the stage via a space in the processing container;
• an upper electrode having flexibility and being provided above the dielectric plate, the upper electrode being configured to provide a gap between the dielectric plate and the upper electrode;
• an introduction part of radio frequency waves that are VHF waves or UHF waves, the introduction part being provided at a horizontal end portion of the space;
• a driving shaft that is a central axial line of the processing container extending in a vertical direction and is coupled to the upper electrode on the central axial line including a center of the stage;
• and
• an actuator configured to move the driving shaft in the vertical direction.

A plasma processing method of performing plasma processing on a substrate by using a plasma processing apparatus, the method comprising:

• supplying a gas to a space in a processing container of the plasma processing apparatus;
• and
• introducing radio frequency waves into the space in order to perform the plasma processing on the substrate placed on a stage in the processing container,
• wherein the plasma processing apparatus includes:
• the processing container;
• the stage provided in the processing container;
• a dielectric plate provided above the stage via the space in the processing container;
• an upper electrode having flexibility and being provided above the dielectric plate, the upper electrode being configured to provide a gap between the dielectric plate and the upper electrode;
• an introduction part of radio frequency waves that are VHF waves or UHF waves, the introduction part being provided at a horizontal end portion of the space;
• a driving shaft that is a central axial line of the processing container extending in a vertical direction and is coupled to the upper electrode on the central axial line including a center of the stage;
• and
• an actuator configured to move the driving shaft in the vertical direction.