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AssigneeLam Research Corporation
InventorsPaul KONKOLA, Ramesh CHANDRASEKHARAN, Andrew H. BRENINGER, Tony Shaleen KAUSHAL
Estimating the term…
A processing tool, comprising a processing chamber for processing a work piece, the processing chamber including at least one component part that is coated with multi-layer protective coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer. In various embodiments, the multi-layer protective coating can be applied to at least one component part prior to assembly of the processing chamber or at least partially in situ the processing chamber.
A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part having a multi-layer coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer.
A method of assembling a work piece processing tool comprising assembling a processing chamber using at least one component part having a multi-layer coating including (a) an aluminum layer formed on the at least one component part and (b) a ceramic coating formed on the aluminum layer.
Dependencies are inferred from the claim text.