US 2022/0027533 A1 · SIMULATION METHOD, SIMULATION APPARATUS, COMPUTER READABLE MEDIUM, FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

Abstract

A simulation method is performed for simulating a behavior of a curable composition in a film forming apparatus that brings the curable composition arranged on a first member and a second member into contact with each other, and forms a film of the curable composition on the first member. The method includes obtaining a difference between a nominal value for simulating the behavior and an actual value corresponding to the nominal value in the film forming apparatus, and simulating the behavior using, as input information, the actual value obtained from the nominal value and the difference.

Claims20

Dependent claims

A simulation method of simulating a behavior of a curable composition in a film forming apparatus that brings the curable composition arranged on a first member and a second member into contact with each other, and forms a film of the curable composition on the first member, the method comprising:

obtaining a difference between a nominal value for simulating the behavior and an actual value corresponding to the nominal value in the film forming apparatus;
and
simulating the behavior using, as input information, the actual value obtained from the nominal value and the difference.

Dependencies are inferred from the claim text.

Facts

Application

17/372,622Filed 12 Jul 2021

Priority

JP 2020-12464421 Jul 2020

Published

27 Jan 2022

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

G06F 30/20
Computer-aided design [CAD]: design optimisation, verification or simulation
G06F 30/28
Design optimisation, verification or simulation: using fluid dynamics, e.g. using Navier-Stokes equations or computational fluid dynamics [CFD]
G06F 30/25
Design optimisation, verification or simulation: using particle-based methods
G06T 11/40
Two-dimensional [2D] image generation: filling planar surfaces by adding surface attributes, e.g. adding colours or textures

Simulation method, simulation apparatus, computer readable medium, film forming apparatus, and method of manufacturing article

Life of this patent

Simulation method, simulation apparatus, computer readable medium, film forming apparatus, and method of manufacturing article

Life of this patent

Abstract

Claims20