Inter-step feedforward process control in the manufacture of semiconductor devices

A system for process control in the manufacture of semiconductor devices comprising:

• a metrology tool operative to perform metrology on at least one semiconductor wafer included in a given lot of semiconductor wafers, following processing of said at least one semiconductor wafer by a first processing step;
• a correctable generator operative to generate, based on said metrology, at least one correctable to a second processing step, subsequent to said first processing step;
• and
• a controller operative to adjust, based on said at least one correctable, performance of said second processing step on at least some semiconductor wafers of said given lot of semiconductor wafers.