Euv pellicle and mounting method thereof on photo mask
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWen-Yao Wei, Chi-Lun Lu, Hsin-Chang Lee
Life of this patent
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Abstract
In a method of de-mounting a pellicle from a photo mask, the photo mask with the pellicle is placed on a pellicle holder. The pellicle is attached to the photo mask by a plurality of micro structures. The plurality of micro structures are detached from the photo mask by applying a force or energy to the plurality of micro structures before or without applying a pulling force to separate the pellicle from the photo mask. The pellicle is de-mounted from the photo mask. In one or more of the foregoing and following embodiments, the plurality of micro structures are made of an elastomer.
Claims20
A method of de-mounting a pellicle from a photo mask, comprising:
- placing the photo mask with the pellicle on a pellicle holder, wherein the pellicle is attached to the photo mask by a plurality of micro structures;
- detaching the plurality of micro structures from the photo mask by applying a force or energy to the plurality of micro structures before or without applying a pulling force to separate the pellicle from the photo mask;
- and
- de-mounting the pellicle from the photo mask.
A method of mounting a pellicle from a photo mask, comprising:
- placing the photo mask on a photo mask holder;
- placing the pellicle on a pellicle holder, wherein the pellicle includes a frame having an opening, and a plurality of micro structures are disposed on a bottom of the frame;
- attaching the plurality of micro structures to the photo mask by moving the pellicle holder so that the plurality of micro structures abut a surface of the photo mask;
- and
- moving the pellicle holder to leave the photo mask with the pellicle on the mask holder.
A pellicle for an extreme ultra violet (EUV) photo mask, the pellicle comprising:
- an EUV transparent membrane;
- a frame having an opening;
- and
- a plurality of micro structures made of an adhesive elastomer and disposed on a bottom of the frame.
Dependencies are inferred from the claim text.