Method for measuring shortest distance between capacitances and method for evaluating capacitance manufacture procedure

Abstract

The application provides a method for measuring a shortest distance between capacitances and a method for evaluating a capacitance manufacture procedure. The method for measuring the shortest distance between the capacitances includes: obtaining a distance between tangent lines of adjacent surfaces of two adjacent capacitances, and taking the distance between the tangent lines of the adjacent surfaces of the two adjacent capacitances as the shortest distance between two capacitances. The tangent lines of the adjacent surfaces of the two adjacent capacitances have a same direction, and the direction of the tangent lines is perpendicular to a preset arrangement direction of the capacitances.

Dependencies are inferred from the claim text.