Test handler and semiconductor device equipment including same

A test handler comprising:

• a plurality of pushers configured to comes into contact with a plurality of Devices Under Test (DUTs) to transfer heat, the plurality of pushers including a first pusher and a second pusher, the first pusher on a central region of a test tray and the second pusher on an outer region of the test tray;
• a porous match plate having the plurality of pushers on respective ones of a plurality of pusher arrangement regions thereof with a plurality of holes placed between respective ones of the plurality of pusher arrangement regions;
• a heater including a central heater on the first pusher and an outer heater on the second pusher;
• and
• an airflow input port on the heater, the airflow input port configured to provide the airflow to the plurality of holes such that the airflow passes through a space between the central heater and the outer heater and through the plurality of holes to control temperatures of the plurality of pushers.

A semiconductor element test device comprising:

• a test board configured to electrically connect with a device under test (DUT);
• a test tray including an input port configured to receive the DUT to fix the DUT to the test board;
• a pusher including a pusher end and a pusher body, the pusher end separating the test tray from the pusher body, the pusher end configured to penetrate the input port to come into contact with the DUT, the pusher body configured to transfer heat to the DUT through the pusher end;
• a porous match plate having the pusher body on a pusher arrangement region thereof with a plurality of holes adjacent to the pusher arrangement region;
• a heater on an upper surface of the porous match plate, the heater configured to control a temperature of the pusher;
• an airflow input port on the heater, the airflow input port configured to provide airflow to the plurality of holes;
• and
• a variable flow tunnel configured to transport the airflow between the airflow input port and the heater such that a length of the variable flow tunnel between the airflow input port and the heater is variable as the airflow passes through the variable flow tunnel, through the plurality of holes, and through a separated space between the test tray and the pusher body.