A tunable filter having different gaps

A tunable filter, comprising:

• a moveable member and a stationary member, the moveable member is configured to move with respect to the stationary member;
• the moveable member comprises a first optical component and a first actuation element and the stationary member comprises a second optical component and a second actuation element, wherein there is an optical gap between the first and second optical components;
• and
• the first and second actuation elements are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap, wherein the optical gap is substantially smaller than the actuation gap;
• wherein the moveable member either comprises the first optical component or is mechanically coupled to the first optical component and;
• wherein the moveable member is formed of or comprises silicon and the stationary member is formed of or comprises glass and an inner surface of the first actuating element is positioned within a recess formed by etching of the moveable member;
• wherein the moveable member is physically connected to a flexible member that allows movement of the moveable member upon application of the actuation signal.

A tunable filter, comprising:

• a moveable member and a stationary member, the moveable member is configured to move with respect to the stationary member;
• the moveable member comprises a first optical component and a first actuation regions and the stationary member comprises a second optical component and a second actuation regions, wherein there is an optical gap between the first and second optical components;
• and
• the first and second actuation regions are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap;
• wherein the moveable member either comprises the first optical component or is mechanically coupled to the first optical component;
• wherein the moveable member is physically connected to a flexible member that allows movement of the moveable member upon application of the actuation signal;
• and wherein the flexible member is undulated/corrugated shaped and configured and wherein the moveable member, the flexible member and the stationary member, enclose a gas-tight sealed chamber.

A tunable filter, comprising:

• a moveable member and a stationary member, the moveable member is configured to move with respect to the stationary member;
• the moveable member comprises a first optical component and a first actuation element and the stationary member comprises a second optical component and a second actuation element, wherein there is an optical gap between the first and second optical components;
• and
• the first and second actuation elements are configured, once supplied with at least one actuating signal, to be positioned at an actuation gap from each other and to define the optical gap, wherein the optical gap is substantially smaller than the actuation gap;
• wherein the moveable member either comprises the first optical component or is mechanically coupled to the first optical component and an inner surface of the first actuating element is positioned within a recess formed in the moveable member;
• wherein the moveable member is physically connected to a flexible member that allows movement of the moveable member upon application of the actuation signal;
• and wherein the flexible member is undulated/corrugated shaped.