Method of manufacturing semiconductor devices using a heat transfer fluid comprising fluorinated compounds having a low gwp

Abstract

The present invention relates to a method for manufacturing semiconductor devices, including a step wherein a semi-conductor device exchanges heat with a heat transfer fluid. The heat transfer fluid comprises one or more chemical compounds having the general formula: Ph(ORf)x (I) wherein Ph is an aromatic ring linked to one or more ether groups —ORf where each —Rf: — is a monovalent fluorinated alkyl group comprising at least one C—F bond, — has a carbon chain, preferably a C1-C10 carbon chain, which can be linear or can comprise branches and/or cycles, and, optionally, can comprise in chain heteroatoms selected from O, N or S, and wherein, when X>1, the —Rf groups on the same molecule can be equal to or different from each other.

Dependencies are inferred from the claim text.