Method for operating a capacitive mems sensor, and capacitive mems sensor

A method for operating a capacitive MEMS sensor, comprising the following steps:

• supplying a defined electrical potential on a deflectably mounted seismic mass of the MEMS sensor;
• capacitively inducing a vibrational motion of the seismic mass using a clocked electrical control voltage;
• and
• compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with a frequency of the clocked electrical control voltage.

A capacitive MEMS sensor, comprising:

• a deflectably mounted seismic mass;
• a circuit device configured to supply a defined electrical potential on the seismic mass;
• an excitation device configured to capacitively set the seismic mass into vibrational motion;
• a driving device configured to supply a clocked electrical control voltage to capacitively induce a vibrational motion of the seismic mass using the excitation device;
• and
• a compensation device having an electrical storage element, the compensation device being connected to the seismic mass, and being configured to compensate for fluctuations in an electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging the electrical storage element in accordance with a frequency of the clocked electrical control voltage.