Semiconductor device and method for manufacturing semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsYuichi YANAGISAWA, Ryota HODO, Satoru OKAMOTO
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsYuichi YANAGISAWA, Ryota HODO, Satoru OKAMOTO
Estimating the term…
A semiconductor device with favorable electrical characteristics is provided. The semiconductor device includes a first insulator, a first oxide over the first insulator, a second insulator provided between the first insulator and the first oxide, a second oxide in contact with the first insulator and in contact with a side surface of the first oxide, and a third insulator over the first insulator, the second oxide, and the first oxide. The third insulator includes a region in contact with a top surface of the first oxide. The second insulator and the third insulator include a material which is less likely to pass oxygen than the second oxide.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.