Semiconductor memory device and production method thereof
AssigneeToshiba Memory Corporation
InventorsTadashi Iguchi, Murato Kawai, Toru Matsuda, Hisashi Kato, Megumi Ishiduki
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AssigneeToshiba Memory Corporation
InventorsTadashi Iguchi, Murato Kawai, Toru Matsuda, Hisashi Kato, Megumi Ishiduki
Estimating the term…
A method of producing a semiconductor memory device includes, when three directions crossing each other are set to first, second, and third directions, respectively, laminating a plurality of first laminates and a plurality of second laminates on a semiconductor substrate in the third direction. The method further includes forming ends of the plurality of first laminates in shapes of steps extending in the first direction, and forming ends of the plurality of second laminates in shapes of steps extending in both directions of the first direction and the second direction.
A semiconductor memory device comprising:
Dependencies are inferred from the claim text.