Pin lifting device having a temperature sensor

A system comprising:

• a pin lifting device configured for moving and positioning a substrate in a process atmosphere region (P) provided by a vacuum process chamber, the pin lifting device comprising:
• a coupling part having a coupling designed to receive a support pin designed to contact and support the substrate;
• a drive part having a drive unit configured to drive the coupling linearly along an adjustment axis (A) from;
• a lowered normal position, where the support pin is configured to present in a state received by the coupling in a state substantially free of action with respect to its intended effect, to
• an extended support position in which, in particular, the carrying pin in a state received by the coupling provides its intended effect of receiving and/or providing the substrate,
• and back, wherein
• the pin lifting device has at least one temperature sensor, wherein the temperature sensor is designed and arranged in such a way that, by means of the temperature sensor, a measurement signal representing thermal information with reference to at least part of the pin lifting device can be generated;
• and
• a processing and control unit, wherein the processing and control unit is configured to:
• receiv and/or process the measurement signal of the at least one temperature sensor, and
• generate and/or output status information for the pin lifting device as a function of the measurement signal.