Substrate processing device
AssigneeSCREEN Holdings Co., Ltd.
InventorMasaki INABA
Life of this patent
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Abstract
A substrate processing device is a device continuously performing wet processing and dry processing. The substrate processing device includes a plurality of processing modules. Each of the plurality of processing modules includes a single wet processing unit performing wet processing on a substrate; a single dry processing unit performing dry processing on a substrate; and a single transfer unit located between the wet processing unit and the dry processing unit to transfer a substrate between the wet processing unit and the dry processing unit.
Claims12
A substrate processing device continuously performing wet processing and dry processing on a substrate, comprising
- a plurality of processing modules, wherein
- each of the plurality of processing modules includes:
- a single wet processing unit performing wet processing on a substrate;
- a single dry processing unit performing dry processing on a substrate;
- and
- a single transfer unit located between the wet processing unit and the dry processing unit to transfer a substrate between the wet processing unit and the dry processing unit.
Dependencies are inferred from the claim text.