Back to results
US 2022/0020571 A1Published application
Temperature sensor and plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsHiroyuki MATSUURA, Qingzhen WEN
Life of this patent
Estimating the term…
Abstract
A temperature sensor includes: a thermocouple having a temperature measurement contact in a processing container in which a plasma processing is performed, and configured to measure a temperature inside the processing container; a protective tube configured to accommodate and protect the thermocouple; and an electromagnetic shield provided in the protective tube to cover the thermocouple.
Claims18
A temperature sensor comprising:
- a thermocouple having a temperature measurement contact in a processing container in which a plasma processing is performed, and configured to measure a temperature inside the processing container;
- a protective tube configured to accommodate and protect the thermocouple;
- and
- an electromagnetic shield provided in the protective tube to cover the thermocouple.
1 more element
A plasma processing apparatus comprising:
- a processing container in which a plasma processing is performed;
- and
- a temperature sensor configured to measure a temperature inside the processing container,
- wherein the temperature sensor includes:
- a thermocouple having a temperature measurement contact in the processing container;
- a protective tube configured to accommodate and protect the thermocouple;
- and
- an electromagnetic shield provided in the protective tube to cover the thermocouple.
5 more elements
Dependencies are inferred from the claim text.