Quartz glass crucible
AssigneeSumco Corporation
InventorsHiroshi KISHI, Kouta HASEBE, Takahiro ABE, Hideki FUJIWARA
Life of this patent
Estimating the term…
Loading patent…
AssigneeSumco Corporation
InventorsHiroshi KISHI, Kouta HASEBE, Takahiro ABE, Hideki FUJIWARA
Estimating the term…
A quartz glass crucible (1) includes: a cylindrical crucible body (10) which has a bottom and is made of quartz glass; and a first crystallization-accelerator-containing coating film (13A) which is formed on an inner surface (10a) so as to cause an inner crystal layer composed of an aggregate of dome-shaped or columnar crystal grains to be formed on a surface-layer portion of the inner surface (10a) of the crucible body (10) by heating during a step of pulling up the silicon single crystal by a Czochralski method. The quartz glass crucible is intended to withstand a single crystal pull-up step undertaken for a very long period of time.
A quartz glass crucible used for pulling up a silicon single crystal by a Czochralski method, comprising:
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
(canceled)
A quartz glass crucible used for pulling up a silicon single crystal by a Czochralski method, comprising:
Dependencies are inferred from the claim text.