Multilayer encapsulation thin-film
AssigneesResearch & Business Foundation Sungkyunkwan University, Samsung Display Co., Ltd.
InventorsChoelmin JANG, Sungmin CHO, Ho Kyoon CHUNG, Heeyeop CHAE, Sang Joon SEO, Seung Woo SEO
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Abstract
A multilayer encapsulation thin-film and a method and apparatus for preparing a multilayer encapsulation thin-film are provided. The multilayer encapsulation thin-film includes an inorganic thin film that includes a metal oxide, and an organic thin film that includes a polymer and is formed on the inorganic thin film, where the inorganic thin film and the organic thin film are alternately stacked in multiple layers.
Claims6
A method of preparing a multilayer encapsulation thin-film, the method comprising:
- forming an inorganic thin film comprising a metal oxide on a substrate;
- and
- forming an organic thin film comprising a polymer on the inorganic thin film,
- wherein the forming of the inorganic thin film on the substrate and the forming of the organic thin film comprising the polymer on the inorganic thin film are alternately carried out, so that the inorganic thin film and the organic thin film are alternately stacked.
Dependencies are inferred from the claim text.