US 2022/0016768 A1 · APPARATUS AND METHODS FOR ENHANCED MICROELECTRONIC DEVICE HANDLING

Abstract

This patent application relates to apparatus and methods for enhanced microelectronic device handling. Apparatus comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface. Related methods are also disclosed.

Claims31

Dependent claims

Apparatus for handling microelectronic devices, comprising:

a pick arm having a pick surface configured for receiving a microelectronic device thereon;
drives for moving the pick arm and reorienting the pick surface in X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis;
and
a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force or at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface.

1 more element

A method, comprising:

moving a pick arm of a pick and place apparatus toward a singulated microelectronic device;
initiating contact of the microelectronic device with a pick surface of the pick arm;
and
sensing, with a sensor device carried by the pick arm, at least one of one or more forces or one or more locations of force applied between the pick surface and the contacted microelectronic device.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

16/930,144Filed 15 Jul 2020

Published

20 Jan 2022

Term ends

Not estimatedThe source records don’t support an estimate.

Classification25 codes

B25J 9/1633
Characterised by the control loop: compliant, force, torque control, e.g. combined with position control
B25J 13/085
By means of sensing devices, e.g. viewing or touching devices: force or torque sensors
B25J 19/028
Sensing devices: piezoresistive or piezoelectric sensing devices
H05K 13/082
Monitoring manufacture of assemblages: integration of non-optical monitoring devices, i.e. using non-optical inspection means, e.g. electrical…

Apparatus and methods for enhanced microelectronic device handling

Life of this patent

Apparatus and methods for enhanced microelectronic device handling

Life of this patent

Abstract

Claims31