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US 2022/0013725 A1Published application
Mask assembly and deposition apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsAREUM LEE, JEONGKUK KIM, HWI KIM, SEUNGYONG SONG, KYU HWAN HWANG
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Abstract
A mask includes a body unit through which a deposition opening is defined, and a protrusion unit through which a pattern opening is defined and which protrudes from a corner of the body unit, where a thickness of the body unit is greater than a thickness of the protrusion unit.
Claims20
A mask comprising:
- a body unit through which a deposition opening is defined;
- and
- a protrusion unit through which a pattern opening is defined and which protrudes from a corner of the body unit,
- wherein a thickness of the body unit is greater than a thickness of the protrusion unit.
1 more element
A deposition apparatus comprising:
- a chamber;
- a mask arranged inside the chamber;
- a base substrate arranged on the mask, and comprising a first area adjacent to a corner and a second area surrounding at least a portion of the first area;
- and
- a deposition source which provides a deposition material to the base substrate,
- wherein the mask comprises:
- a body unit in which a deposition opening exposing the second area is defined;
- and
- a protrusion unit in which a pattern opening exposing a portion of the first area is defined and which protrudes from a corner of the body unit and covers a remaining portion of the first area,
- wherein a thickness of the body unit is greater than a thickness of the protrusion unit.
7 more elements
Dependencies are inferred from the claim text.