Apparatus for transferring substrate, and apparatus and method for treating substrate

An apparatus for transferring a substrate, the apparatus comprising:

• a body;
• a first hand disposed on the body;
• a second hand disposed on the body;
• a third hand disposed on the body;
• and
• a controller configured to control individually driving each of the first hand, the second hand, and the third hand,
• wherein the controller is configured to:
• control the first hand to transfer a substrate before a liquid treatment process is performed,
• control the third hand to transfer the substrate which is dried, and
• control the second hand to transfer the substrate having a surface coated with a wetting solution in the liquid treatment process.

An apparatus for treating a substrate, the apparatus comprising:

• a process treating unit configured to treat a substrate;
• and
• an index unit including a load port on which a container having the substrate is placed, and an index robot to transfer the substrate between the container and the process treating unit,
• wherein the process treating unit includes:
• a transfer chamber having a substrate transfer apparatus to transfer the substrate to a destination and disposed adjacent to the index unit;
• a first process chamber disposed at a first side of the transfer chamber to perform a liquid treatment process on the substrate received from the transfer chamber;
• a second process chamber disposed at a second side of the transfer chamber to perform, by using a supercritical fluid or isopropyl alcohol (IPA), a drying treatment process on the substrate received from the first process chamber;
• and
• a controller configured to control the substrate transfer apparatus,
• wherein the substrate transfer apparatus includes:
• a first hand to transfer the substrate from the transfer chamber to the first process chamber before the liquid treatment process is performed;
• a second hand to transfer the substrate, which is coated with a wetting solution in the first process chamber, from the first process chamber to the second process chamber;
• and
• a third hand to withdrawn the substrate which dried in the second process chamber from the second process chamber, and
• wherein the controller is configured to:
• control the second hand to transfer the substrate at a speed lower than a speed of transferring the substrate by the first hand or the third hand.