Crane monitoring system and method
AssigneeChangxin Memory Technologies, Inc.
InventorWei FENG
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AssigneeChangxin Memory Technologies, Inc.
InventorWei FENG
Estimating the term…
A crane monitoring system includes: a first detection apparatus configured to detect a position of a crane, to send a first detection signal when the crane is located above a Front Opening Unified Pod (FOUP) load port of a semiconductor device, and to send a second detection signal when the crane leaves a space above the FOUP load port; a processing apparatus configured to generate a start control signal responsive to receiving the first detection signal, and to generate a stop control signal responsive to receiving the second detection signal; and a second detection apparatus configured to start a detection of whether there is a foreign matter between the crane and the FOUP load port after receiving the start control signal, and to stop the detection after receiving the stop control signal.
A crane monitoring system, comprising:
A crane monitoring method, comprising:
Dependencies are inferred from the claim text.