Transfer carousel with detachable chucks
AssigneeApplied Materials, Inc.
InventorsBhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Thomas BREZOCZKY
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Abstract
A transfer apparatus for use in a multiple processing region system is disclosed that includes a carousel that includes a hub having a plurality of transfer arms extending therefrom. Each of the transfer arms include a first end coupled to the hub and a second end, the second end comprising a component supporting region, and a plurality of electrical interface connections distributed about the component supporting region.
Claims20
A transfer apparatus for use in a multiple processing region system, comprising:
- a carousel that includes a hub having a plurality of transfer arms extending therefrom, wherein each of the transfer arms include:
- a first end coupled to the hub and a second end, the second end comprising a component supporting region;
- and
- a plurality of electrical interface connections distributed about the component supporting region.
A transfer apparatus, comprising:
- a carousel that includes a hub having a plurality of transfer arms extending therefrom, wherein each of the transfer arms include:
- a first end and a second end;
- and
- a plurality of electrical interface connections distributed about the second end and protruding from a surface thereof, wherein each of the plurality of transfer arms includes a feature formed therein for receiving a plurality of electrical wires positioned between the hub and the electrical interface connections.
An apparatus for substrate processing, comprising:
- a plurality of processing chambers coupled to a central transfer chamber, wherein the central transfer chamber comprises:
- a carousel that comprises:
- a hub having a plurality of transfer arms extending therefrom at an angle relative to a rotational axis of the carousel, wherein each of the transfer arms include a first end and a second end, and
- a plurality of electrical interface connections distributed about the second end.
Dependencies are inferred from the claim text.