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AssigneeBoard of Regents, The University of Texas System
InventorsAli E. Aliev, Ray H. Baughman
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A dry-state non-contact method for patterning of nanostructured conducting materials is disclosed. Short self-generated electron-emission pulses in air at atmospheric pressure can enable an electron-emission-based (field enhancement) interaction between a sharp tungsten tip and elements of the nanostructured materials to cause largely non-oxidative sequential decomposition of the nanostructured elements. Embodiments can employ a substrate/tip gap of 10 to 20 nm, discharge voltages of 25-30 V, and patterning speeds as fast as 10 cm/s to provide precisely patterned nanostructures (<200 nm) that are largely free of foreign contaminants, thermal impact and sub-surface structural changes.
A method of non-contact, dry-state patterning of a conducting nanostructured material, the method comprising:
An apparatus for non-contact, dry-state patterning of a conducting nanostructured material, the apparatus comprising:
Dependencies are inferred from the claim text.