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US 2021/0379736 A1Published application
Vacuum tables
AssigneeHP Indigo B.V.
InventorsYonni Hartstein, Yaron Yahav
Life of this patent
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AssigneeHP Indigo B.V.
InventorsYonni Hartstein, Yaron Yahav
Estimating the term…
There is disclosed a vacuum table 400 comprising a vacuum plate 402 separating a first vacuum chamber 406 from a substrate zone 60 for receiving a substrate 50. The vacuum plate has a plurality of suction holes 404 for conveying a gas flow from the substrate zone 60 to the first vacuum chamber 406. There is an evacuation port 422 in communication with a second vacuum chamber 420 to evacuate gas from the substrate zone 60 when a substrate 50 is received over the suction holes 404 of the vacuum plate 402, and a vacuum port 424 for discharging gas received in the second vacuum chamber 420 to a vacuum source 423. The first vacuum chamber 406 and the second vacuum chamber 420 are in fluid communication via a valve 430 so that gas flows from the first vacuum chamber 406 to the vacuum port 424 via the second vacuum chamber 420. The valve 430 is controllable to vary a gas flow rate through the vacuum plate 402 and thereby vary a retaining force on a substrate 50 received thereon.
A vacuum table comprising;
A partition for retrofitting a vacuum table having a vacuum plate above a single compound vacuum chamber, the partition to separate the single compound vacuum chamber into a first vacuum chamber and a second vacuum chamber, the partition comprising;
A method of operating a vacuum table, the vacuum table comprising a single vacuum source for evacuating a first vacuum chamber and a second vacuum chamber, the vacuum table further comprising a vacuum plate with a plurality of suction holes for separating the first vacuum chamber from a substrate zone for receiving a substrate, the second vacuum chamber fluidly connected to the substrate zone through a separate evacuation port, the method comprising:
Dependencies are inferred from the claim text.