MIcro Pump Systems and Processing Techniques

A micro pump comprising:

• a plurality of micro pump elements, each micro pump element comprising:
• a pump body having walls that enclose a pump chamber that is compartmentalized into plural compartments, a plurality of inlet ports each with unobstructed fluid ingress into corresponding ones of the plural compartments and a plurality of outlet ports each with unobstructed fluid egress from corresponding ones of the plural compartments;
• a plurality of membranes disposed in the pump chamber, with the plurality of membranes affixed to the walls of the pump body, and which compartmentalized the chamber to provide the plural compartments;
• and
• a plurality of electrodes, with a first pair of the plurality of electrodes disposed on a pair of opposing walls of the pump body, and each of the remaining ones of the plurality of electrodes disposed on a major surface of a corresponding one of the plurality of membranes;
• with the plurality of micro pump elements arranged in a series connected configuration that has outlets of a first one of the plurality of micro pump elements fluidly connected to inlets of an immediately adjacent one of the plurality of micro pump elements.