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US 2021/0343944 A1Published application
Etchant composition and method of manufacturing display apparatus by using the same
AssigneeSamsung Display Co., Ltd.
InventorsJonghee PARK, Jinseock KIM
Life of this patent
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Abstract
An etchant composition includes an inorganic acid compound of about 8 wt % to about 15 wt %, a sulfonic acid compound of about 2.5 wt % to about 8 wt %, a sulfate compound of about 6 wt % to about 14 wt %, an organic acid compound of about 40 wt % to about 55 wt %, a metal or metal salt of about 0.01 wt % to about 0.06 wt %, and water.
Claims26
An etchant composition comprising:
- an inorganic acid compound of about 8 wt % to about 15 wt %;
- a sulfonic acid compound of about 2.5 wt % to about 8 wt %;
- a sulfate compound of about 6 wt % to about 14 wt %;
- an organic acid compound of about 40 wt % to about 55 wt %;
- a metal or metal salt of about 0.01 wt % to about 0.06 wt %;
- and
- water.
4 more elements
A method of manufacturing a display apparatus comprising a display area and a non-display area, the method comprising:
- forming a thin film transistor on a substrate of the display area;
- forming a planarization layer on the thin film transistor;
- forming an electrode layer on the planarization layer;
- and
- forming a pixel electrode by etching the electrode layer with an etchant composition, wherein the etchant composition comprises:
- an inorganic acid compound of about 8 wt % to about 15 wt %;
- a sulfonic acid compound of about 2.5 wt % to about 8 wt %;
- a sulfate compound of about 6 wt % to about 14 wt %;
- an organic acid compound of about 40 wt % to about 55 wt %;
- a metal or metal salt of about 0.01 wt % to about 0.06 wt %;
- and
- water.
9 more elements
Dependencies are inferred from the claim text.