Pneumatic shutters to control organic vapor jet printing
AssigneeThe Regents of the University of Michigan
InventorsStephen R. FORREST, Jeffrey A. HOROWITZ
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Abstract
Devices, systems, and techniques are provided for improved OVJP deposition using a shutter disposed within the OVJP print head, between the print head inlet and the nozzle outlets. An OVJP print head as disclosed includes an inlet for organic material entrained in a carrier gas, a micronozzle array outlet, and a shutter disposed in the gas flow path between the inlet and the micronozzle array outlet. The shutter allows for rapid cutoff of carrier gas flow through the print head with extremely low latency.
Claims21
An organic vapor jet printing (OVJP) deposition device, comprising:
- an OVJP print head comprising:
- a micronozzle array comprising at least one inlet through which organic material entrained in a carrier gas enters the micronozzle array and a plurality of nozzle outlets through which material is ejected from the micronozzle array;
- and
- a shutter disposed between the plurality of nozzle outlets and the inlet and having an open configuration and a closed configuration, wherein the shutter allows gas flow into the plurality of nozzle outlets in the open configuration and prevents gas flow into the plurality of nozzle outlets in the closed configuration.
21-23. (canceled)
Dependencies are inferred from the claim text.