Diffusion and/or enhancement layers for electrical contact regions
OwnerDaniel Jenner Lichtenwalner, Edward Robert Van Bruntinventors
Life of this patent
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Abstract
Power switching devices include a semiconductor layer structure comprising an active region and an inactive region, the active region comprising a plurality of unit cells and the inactive region comprising a gate pad on the semiconductor layer structure and a gate bond pad on and electrically connected to the gate pad, an isolation layer between the gate pad and the gate bond pad, and a barrier layer between the gate pad and the isolation layer.
Claims29
A semiconductor device comprising:
- a semiconductor layer structure comprising an active region and an inactive region, the active region comprising a plurality of unit cells and the inactive region comprising a gate pad on the semiconductor layer structure and a gate bond pad on and electrically connected to the gate pad;
- an isolation layer between the gate pad and the gate bond pad;
- and
- a barrier layer between the gate pad and the isolation layer.
3-4. (canceled)
A semiconductor device comprising:
- a semiconductor substrate;
- a gate pad on the semiconductor substrate;
- a gate bond pad on and electrically connected to the gate pad;
- a first barrier layer between a bottom portion of gate bond pad and the gate pad in a first direction perpendicular to a top surface of the semiconductor substrate;
- and
- a second barrier layer between the gate pad and the first barrier layer in the first direction.
15-16. (canceled)
21-24. (canceled)
A semiconductor device, comprising:
- a semiconductor layer structure;
- a plurality of unit cell transistors that are electrically connected in parallel, each unit cell transistor including a gate finger that extends in a first direction on a top surface of the semiconductor layer structure, the gate fingers spaced apart from each other along a second direction;
- and
- an auxiliary gate electrode barrier layer on an upper surface of each of the gate fingers.
(canceled)
(canceled)
(canceled)
Dependencies are inferred from the claim text.