Array substrate and method for manufacturing the same
AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorChao Li
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Abstract
The present invention provides an array substrate and a method for manufacturing the array substrate. The method includes: providing a substrate and forming a buffer layer, a poly-silicon layer and a first gate insulating layer sequentially on the substrate; and forming a first gate metal layer on the first gate insulating layer, forming a first photoresist stickiness maintaining metal film on the first gate metal layer, forming a patterned gate electrode and a first patterned photoresist stickiness maintaining metal on a surface of the patterned gate electrode by a first developing process.
Claims10
A method for manufacturing an array substrate, wherein the method comprises:
- a step S1 of providing a substrate and forming a buffer layer, a poly-silicon layer and a first gate insulating layer sequentially on the substrate;
- and
- a step S2 of forming a first gate metal layer on the first gate insulating layer, forming a first photoresist stickiness maintaining metal film on the first gate metal layer, forming a patterned gate electrode and a first patterned photoresist stickiness maintaining metal on a surface of the patterned gate electrode by a first developing process;
- wherein the first patterned photoresist stickiness maintaining metal and the gate electrode are manufactured by a same mask process.
An array substrate, comprising:
- a substrate;
- a buffer layer formed on the substrate;
- a poly-silicon layer formed on the buffer layer;
- a first gate insulating layer formed on the poly-silicon layer;
- a gate electrode corresponding to the poly-silicon layer and formed on the first gate insulating layer;
- and
- a first photoresist stickiness maintaining metal film formed on a surface of the gate electrode;
- wherein a projection area of the first photoresist stickiness maintaining metal film on the substrate overlaps with a projection area of the gate electrode on the substrate.
Dependencies are inferred from the claim text.