Method and apparatus for manufacturing flexible light-emitting device

An apparatus for producing a flexible light-emitting device, comprising:

• a stage for supporting a multilayer stack which has a first surface and a second surface, the multilayer stack including
• a glass base which defines the first surface,
• a functional layer region including a TFT layer and a light-emitting device layer,
• a synthetic resin film provided between the glass base and the functional layer region and bound to the glass base, the synthetic resin film including a flexible substrate region supporting the functional layer region and an intermediate region surrounding the flexible substrate region, the intermediate region comprising a single continuous sheet-like structure which has openings, and
• a protection sheet which covers the functional layer region and which defines the second surface,
• the intermediate region and the flexible substrate region of the synthetic resin film being divided from each other;
• a lift-off light irradiation unit for irradiating with lift-off light an interface between the synthetic resin film and the glass base in the multilayer stack supported by the stage, and
• an actuator for increasing a distance from the stage to the glass base while the stage is kept in contact with the second surface of the multilayer stack, thereby separating the multilayer stack into a first portion and a second portion,
• wherein the first portion of the multilayer stack includes the intermediate region of the synthetic resin film and a light-emitting device which are adhered to the stage, the light-emitting device including the functional layer region, and the light-emitting device including the flexible substrate region of the synthetic resin film,
• the second portion of the multilayer stack includes the glass base,
• the lift-off light irradiation unit comprises an incoherent light source for emitting the lift-off light, the incoherent light source being a light source in which a plurality of lamps or a plurality of light emitting devices are arranged to emit ultraviolet light.