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US 2021/0343575 A1Published application
Substrate table with vacuum channels grid
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMin-Cheng WU, Chi-Hung LIAO
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Abstract
A substrate table is provided. The substrate table includes a main body having a surface and a plurality of burls extending from the surface. The burls are configured to support a substrate on the main body. The substrate table further includes a number of vacuum channels provided in the burls to apply a vacuum to the substrate. The vacuum channels are distributed throughout the main body and arranged in a grid pattern.
Claims20
A substrate table, comprising:
- a main body having a surface and a plurality of burls extending from the surface, wherein the burls are configured to support a substrate on the main body;
- and
- a plurality of vacuum channels provided in the burls, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed throughout the main body and arranged in a grid pattern.
A substrate table system, comprising:
- a substrate table, comprising:
- a main body having a surface and a plurality of burls extending from the surface, wherein the burls are configured to support a substrate on the main body;
- and
- a plurality of vacuum channels provided in the burls, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed throughout the main body and arranged in a grid pattern;
- and
- a first pressure control module configured to independently control a vacuum pressure in each vacuum channel.
3 more elements
A substrate table system, comprising:
- a substrate table, comprising:
- a main body having a surface and a plurality of burls extending from the surface, wherein the burls are configured to support a substrate on the main body;
- a plurality of vacuum channels provided in the burls, configured to apply a vacuum to the substrate, wherein the vacuum channels are distributed throughout the main body;
- and
- a plurality of gas supply channels provided in the main body and respectively formed with a gas supply opening on the surface, configured to supply a gas to the substrate, wherein the gas supply channels are distributed throughout the main body and formed between the burls, and wherein the vacuum channels and the gas supply channels are alternately arranged;
- and
- a pressure control module configured to independently control a vacuum pressure in each vacuum channel.
4 more elements
Dependencies are inferred from the claim text.