Substrate processing system for processing substrates

A semiconductor processing system for processing semiconductor substrates and provided with a housing formed by a wall, the system further comprising:

• a processing module provided with a reactor for processing the substrates;
• a cassette module provided with a load port for supporting a substrate cassette, the cassette module located adjacent the processing module;
• and,
• an electronics module provided with a support for mounting electronic components, whereby the electronics module is located behind a door in the wall of the system to create access to the electronic components, wherein the electronic components have a straight mounting basis for mounting of the electronics components whereby the mounting basis is mounted in the system under an angle between 5 and 85 degrees with respect to the door when the door is closed.