Automatic selection of algorithmic modules for examination of a specimen

A method of examination of a semiconductor specimen by a processor and memory circuitry (PMC), the method comprising:

• obtaining a set of images of one or more semiconductor specimens,
• obtaining a plurality of algorithmic modules, each algorithmic module being configured to provide, based on an image of a semiconductor specimen, data representative of one or more defects in the image,
• (1) for an image of the set of images, selecting at least one algorithmic module MS out of the plurality of algorithmic modules,
• (2) feeding the image to the at least one algorithmic module MS to obtain data DMS representative of one or more defects in the image,
• (3) obtaining a supervised feedback regarding rightness of data DMS provided by the algorithmic module MS,
• (4) repeating (1) to (3) for a next image of the set of images until a completion criterion is met, wherein an algorithmic module selected at (1) is different for at least two different images of the set of images,
• generating, based at least on the supervised feedback, a score for each of a plurality of the algorithmic modules,
• using scores associated with the algorithmic modules to identify one or more algorithmic modules Mbest as the most adapted among the plurality of algorithmic modules for providing data representative of one or more defects in the set of images.

A non-transitory computer readable medium comprising instructions that, when executed by a processor and memory circuitry (PMC), cause the PMC to perform operations comprising:

• obtaining a set of images of one or more semiconductor specimens, upon obtaining a plurality of algorithmic modules, wherein each algorithmic module is configured to provide, based on an image of a semiconductor specimen, data representative of one or more defects in the image:
• (1) for an image of the set of images, selecting at least one algorithmic module MS out of the plurality of algorithmic modules,
• (2) feeding the image to the at least one algorithmic module MS to obtain data DMS representative of one or more defects in the image,
• (3) obtaining a supervised feedback regarding rightness of data DMS provided by the algorithmic module MS,
• (4) repeating (1) to (3) for a next image of the set of images until a completion criterion is met, wherein an algorithmic module selected at (1) is different for at least two different images of the set of images,
• generating, based at least on the supervised feedback, a score for each of a plurality of the algorithmic modules,
• using scores associated with the algorithmic modules to identify one or more algorithmic modules Mbest as the most adapted among the plurality of algorithmic modules for providing data representative of one or more defects in the set of images.