System, method and apparatus for macroscopic inspection of reflective specimens
AssigneeNanotronics Imaging, Inc.
InventorsJonathan Lee, Damas Limoge, Matthew C. Putman, John B. Putman, Michael Moskie
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Abstract
An inspection apparatus includes a specimen stage configured to retain a specimen, at least three imaging devices arranged in a triangular array positioned above the specimen stage, each of the at least three imaging devices configured to capture an image of the specimen, one or more sets of lights positioned between the specimen stage and the at least three imaging devices, and a control system in communication with the at least three imaging devices.
Claims20
An inspection apparatus, comprising:
- a specimen stage configured to retain a specimen;
- at least three imaging devices arranged in a triangular array positioned above the specimen stage, each of the at least three imaging devices configured to capture an image of the specimen;
- one or more sets of lights positioned between the specimen stage and the at least three imaging devices;
- and
- a control system in communication with the at least three imaging devices, the control system comprising:
- a processor;
- and
- a memory having programming instructions stored thereon, which, when executed by the processor, performs operations comprising:
- initializing a first imaging device of the at least three imaging devices to capture a first image of the specimen;
- initializing a second imaging device of the at least three imaging devices to capture a second image of the specimen;
- initializing a third imaging device of the at least three imaging devices to capture a third image of the specimen;
- receiving the first image from the first imaging device, the second image from the second imaging device, and the third image from the third imaging device;
- for each of the first image, the second image, and the third image, identifying an artifact contained therein;
- removing, from each of the first image, the second image, and the third image, the artifact;
- and
- generating an artifact-free image of the specimen using remaining portions of the first image, the second image, and the third image.
A method of generating an artifact-free image of a specimen with a macro inspection system, comprising:
- receiving, by a computing system from a first imaging device of the macro inspection system, a first image of the specimen;
- receiving, by the computing system from a second imaging device of the macro inspection system, a second image of the specimen;
- receiving, by the computing system from a third imaging device of the macro inspection system, a third image of the specimen,
- wherein the first imaging device, the second imaging device, and the third imaging device are arranged in a triangular array above the specimen;
- for each of the first image, the second image, and the third image, identifying, by the computing system, an artifact contained therein;
- removing, by the computing system, from each of the first image, the second image, and the third image, the artifact;
- and
- generating, by the computing system, an artifact-free image of the specimen using remaining portions of the first image, the second image, and the third image.
A non-transitory computer readable medium having sequences of instructions, which, when executed by a processor, causes a computing system to perform operations comprising:
- receiving, by the computing system from a first imaging device of a macro inspection system, a first image of a specimen;
- receiving, by the computing system from a second imaging device of the macro inspection system, a second image of the specimen;
- receiving, by the computing system from a third imaging device of the macro inspection system, a third image of the specimen,
- wherein the first imaging device, the second imaging device, and the third imaging device are arranged in a triangular array above the specimen;
- for each of the first image, the second image, and the third image, identifying, by the computing system, an artifact contained therein;
- removing, by the computing system, from each of the first image, the second image, and the third image, the artifact;
- and
- generating, by the computing system, an artifact-free image of the specimen using remaining portions of the first image, the second image, and the third image.
Dependencies are inferred from the claim text.