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US 2021/0341839 A1Published application
Fluorocarboxylic acid-containing monomer, fluorocarboxylic acid-containing polymer, resist composition and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Masahiro Fukushima
Life of this patent
Estimating the term…
Abstract
A fluorocarboxylic acid-containing polymer comprising recurring units having formula (A1), but not acid labile group-containing recurring units is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging or pattern collapse independent of whether it is of positive or negative tone.
Claims16
A fluorocarboxylic acid-containing monomer having the formula (A):
- wherein RA is hydrogen or methyl,
- R1 and R2 are each independently hydrogen, or a C1-C10 saturated hydrocarbyl group, C2-C8 unsaturated aliphatic hydrocarbyl group, optionally substituted C6-C10 aryl group, or C4-C10 monovalent group obtained by combining the foregoing, with the proviso that R2 is other than hydrogen when R1 is a C1-C4 alkyl group, R1 and R2 may bond together to form a ring with the carbon atom to which they are attached,
- X1 is a single bond, phenylene, naphthalenediyl or —C(═O)—O—X11—, X11 is a C1-C10 saturated hydrocarbylene group or phenylene group.
A fluorocarboxylic acid-containing polymer comprising recurring units having the formula (A1):
- wherein RA is hydrogen or methyl,
- R1 and R2 are each independently hydrogen, or a C1-C10 saturated hydrocarbyl group, C2-C8 unsaturated aliphatic hydrocarbyl group, optionally substituted C6-C10 aryl group, or C4-C10 monovalent group obtained by combining the foregoing, with the proviso that R2 is other than hydrogen when R1 is a C1-C4 alkyl group, R1 and R2 may bond together to form a ring with the carbon atom to which they are attached,
- X1 is a single bond, phenylene, naphthalenediyl or —C(═O)—O—X11—, X11 is a C1-C10 saturated hydrocarbylene group or phenylene group,
- the polymer being free of recurring units containing an acid labile group.
1 more element
Dependencies are inferred from the claim text.