Method of manufacturing a stamp for imprint lithography, stamp for imprint lithography, imprint roller and roll-to-roll substrate processing apparatus

A stamp for imprint lithography, comprising:

• a stamp support structure,
• an imprint structure having a plurality of features generating a pattern upon imprinting the stamp in a layer, wherein the imprint structure is provided by a layer system comprising a first layer and a second layer, the second layer being on top of the first layer, and
• a stabilization element over the second layer, the stabilization element being attached to the stamp support structure, the stabilization element having a higher bending resistance than the second layer.

An imprint roller for a roll-to-roll substrate processing apparatus, the imprint roller comprising a stamp for imprint lithography, the stamp comprising:

• a stamp support structure,
• an imprint structure having a plurality of features generating a pattern upon imprinting the stamp in a layer, wherein the imprint structure is provided by a layer system comprising a first layer and a second layer, the second layer being on top of the first layer, and
• a stabilization element over the second layer, the stabilization element being attached to the stamp support structure, the stabilization element having a higher bending resistance than the second layer, wherein the stamp support structure is a cylindrical support structure.

A roll-to-roll substrate processing apparatus, comprising an imprint roller for a roll-to-roll substrate processing apparatus, the imprint roller comprising a stamp for imprint lithography, the stamp comprising:

• a stamp support structure,
• an imprint structure having a plurality of features generating a pattern upon imprinting the stamp in a layer, wherein the imprint structure is provided by a layer system comprising a first layer and a second layer, the second layer being on top of the first layer, and
• a stabilization element over the second layer, the stabilization element being attached to the stamp support structure, the stabilization element having a higher bending resistance than the second layer, wherein the stamp support structure is a cylindrical support structure.

A method of manufacturing a micro structured product, comprising using an imprint roller for a roll-to-roll substrate processing apparatus, the imprint roller comprising a stamp for imprint lithography, the stamp comprising:

• a stamp support structure,
• an imprint structure having a plurality of features generating a pattern upon imprinting the stamp in a layer, wherein the imprint structure is provided by a layer system comprising a first layer and a second layer, the second layer being on top of the first layer, and
• a stabilization element over the second layer, the stabilization element being attached to the stamp support structure, the stabilization element having a higher bending resistance than the second layer, wherein the stamp support structure is a cylindrical support structure.