Transmission X-Ray Critical Dimension (T-XCD) Characterization of Shift and Tilt of Stacks of High-Aspect-Ratio (HAR) Structures

A system for X-ray measurement, the system comprising:

• an X-ray source configured to generate an X-ray beam;
• optics configured to direct the X-ray beam to a sample comprising at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers comprise respective first and second high aspect ratio (HAR) structures;
• and
• a processor, which is configured to:
• measure, using a detector, X-ray scatter profiles emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam;
• and
• estimate a shift between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.