Deposition mask and method of manufacturing deposition mask

A manufacturing method of a deposition mask in which a plurality of through-holes are formed, comprising:

• a step of preparing a metal plate including a first surface and a second surface opposite to the first surface;
• and
• a processing step of processing the metal plate to obtain the deposition mask which includes a first surface and a second surface in which the plurality of through-holes are formed, a pair of long side surfaces connected to the first surface and the second surface, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask, and a pair of short side surfaces connected to the first surface and the second surface, and defining a profile of the deposition mask in a width direction of the deposition mask;
• wherein the through-hole includes a first recess formed the first surface, and a second recess formed the second surface and connected to the first recess through a hole connection portion;
• wherein the first recess includes a wall surface extending from the hole connection portion to the first surface, the second recess includes a wall surface extending from the hole connection portion to the second surface, a height of the wall surface of the first recess is smaller than the height of the wall surface of the second recess, and the height of the wall surface of the first recess is equal to or less than 6 μm,
• wherein each of the long side surfaces includes a first portion that is recessed inside, the first portion including a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion;
• wherein the through-hole includes a first recess formed on the first surface, and a second recess formed on the second surface and connected to the first recess through a hole connection portion;
• and
• wherein the first end portion of the first portion of the long side surface is positioned closer to the first surface than the hole connection portion.

A manufacturing method of a deposition mask in which a plurality of through-holes are formed, comprising:

• a step of preparing a metal plate including a first surface and a second surface opposite to the first surface;
• and
• a processing step of processing the metal plate to obtain the deposition mask which includes a first surface and a second surface in which the plurality of through-holes are formed, a pair of long side surfaces connected to the first surface and the second surface, and defining a profile of the deposition mask in a longitudinal direction of the deposition mask, and a pair of short side surfaces connected to the first surface and the second surface, and defining a profile of the deposition mask in a width direction of the deposition mask;
• wherein the through-hole includes a first recess formed the first surface, and a second recess formed the second surface and connected to the first recess through a hole connection portion;
• wherein the first recess includes a wall surface extending from the hole connection portion to the first surface, the second recess includes a wall surface extending from the hole connection portion to the second surface, a height of the wall surface of the first recess is smaller than the height of the wall surface of the second recess, and the height of the wall surface of the first recess is equal to or less than 6 μm,
• wherein each of the long side surfaces includes a first portion that is recessed inside, the first portion including a first end portion positioned along the first surface, and a second end portion positioned along the second surface and positioned inside the first end portion;
• wherein the processing step includes a second-surface etching step of etching the metal plate along the second surface so as to form the first portion of the long side surface;
• and
• wherein the second-surface etching step is performed such that the first end portion of the first portion corresponds to a first connection portion to which the first surface and the long side surface are connected, the first connection portion being positioned at a same plane with the first surface.