Extreme ultraviolet light generation system and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating extreme ultraviolet light as turning a target into plasma by irradiating the target with prepulse laser light and main pulse laser light using an extreme ultraviolet light generation system;
• emitting the extreme ultraviolet light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the extreme ultraviolet light in the exposure apparatus to manufacture an electronic device,
• the extreme ultraviolet light generation system including:
• a chamber;
• a target supply unit configured to supply the target to a predetermined region in the chamber;
• a prepulse laser device configured to emit the prepulse laser light to be radiated to the target;
• a main pulse laser device configured to emit the main pulse laser light to be radiated to the target irradiated with the prepulse laser light;
• a beam combiner configured to substantially match an optical path of the prepulse laser light and an optical path of the main pulse laser light;
• a light concentrating optical system arranged on an optical path of the prepulse laser light and the main pulse laser light output from the beam combiner and configured to concentrate the prepulse laser light and the main pulse laser light on the vicinity of the predetermined region;
• a first optical element arranged on the optical path of the prepulse laser light between the prepulse laser device and the beam combiner;
• a first actuator configured to change a travel direction of the prepulse laser light to be output from the first optical element;
• a second actuator configured to change irradiation positions of the prepulse laser light and the main pulse laser light in a plane orthogonal to a travel direction of the prepulse laser light and the main pulse laser light output from the light concentrating optical system;
• a plurality of sensors configured to detect light radiated from the predetermined region by the target being irradiated with the main pulse laser light;
• and a controller configured to control the first actuator and the second actuator based on output of the plurality of sensors, as performing, within one burst period, first control to control the first actuator so that an evaluation value calculated from the output of the plurality of sensors approaches a target value, and after the first control, second control to control the second actuator so that the evaluation value approaches the target value.