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AssigneeUltimems, Inc.
InventorsYee-Chung Fu, Han-Tang Su, Yu-Chun Yu
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A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.
A scanner comprising:
Dependencies are inferred from the claim text.