US 2021/0333474 A1 · EDGE COUPLERS WITH STACKED LAYERING

Abstract

Structures including an edge coupler and methods of fabricating a structure including an edge coupler. The edge coupler includes a waveguide core, and a shaped layer is positioned over a portion of the waveguide core. The waveguide core is comprised of a first material, and the shaped layer is comprised of a second material different in composition from the first material. The first material may be, for example, single-crystal silicon, and the second material may be, for example, silicon nitride.

Claims23

Dependent claims

A structure comprising:

a substrate;
a first dielectric layer on the substrate;
an edge coupler including a waveguide core positioned over the first dielectric layer, the waveguide core comprised of single-crystal silicon;
a shaped layer positioned over a portion of the waveguide core, the shaped layer comprised of silicon nitride;
a second dielectric layer positioned between the waveguide core and the shaped layer;
and
a third dielectric layer over the shaped layer,
wherein the shaped layer is located on the second dielectric layer, and the shaped layer is embedded in the third dielectric layer.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application

16/859,347Filed 27 Apr 2020

Published

28 Oct 2021

Term ends

Not estimatedThe source records don’t support an estimate.

Classification4 codes

G02B 6/1228
Basic optical elements, e.g. light-guiding paths: tapered waveguides, e.g. integrated spot-size transformers
G02B 6/13
Of the integrated circuit kind: integrated optical circuits characterised by the manufacturing method
G02B 6/4206
The coupling comprising intermediate optical elements, e.g. lenses, holograms: optical features
G02B
Optical elements, systems or apparatus

Edge couplers with stacked layering

Life of this patent

Edge couplers with stacked layering

Life of this patent

Abstract

Claims23