Cantilever-Type Probe with Multiple Metallic Coatings
AssigneeKLA Corporation
InventorsHongshuo Zou, Nanchang Zhu, Hai-Yang You
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Abstract
A cantilever-type probe with multiple metallic coatings is disclosed. The cantilever-type probe includes at least one probe pin. A first metallic coating is disposed upon a tip of the probe pin, and a second metallic coating is disposed upon a root of the probe pin. The second metallic coating is in contact with the first metallic coating and comprises a softer (more flexible) metal than the first metallic coating.
Claims20
A cantilever-type probe for measuring one or more characteristics of a sample substrate, comprising:
- at least one probe pin;
- a first metallic coating disposed upon a tip of the at least one probe pin;
- and
- a second metallic coating disposed upon a root of the at least one probe pin, wherein the second metallic coating is in contact with the first metallic coating, and wherein the second metallic coating comprises a softer metal than the first metallic coating.
A sensor for measuring one or more characteristics of a sample substrate, comprising:
- a sensor base;
- a plurality of probe pins extending from the sensor base;
- a first metallic coating disposed upon a tip of at least one probe pin of the plurality of probe pins;
- and
- a second metallic coating disposed upon a root of the at least one probe pin, wherein the second metallic coating is in contact with the first metallic coating, and wherein the second metallic coating comprises a softer metal than the first metallic coating.
A method of manufacturing a cantilever-type probe, comprising:
- forming at least one probe pin;
- disposing a first metallic coating upon a tip of the at least one probe pin;
- and
- disposing a second metallic coating upon a root of the at least one probe pin, wherein the second metallic coating is in contact with the first metallic coating, and wherein the second metallic coating comprises a softer metal than the first metallic coating.
Dependencies are inferred from the claim text.